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Ƙarshen Canja wurin Wafer
Semixlab Alumina Ceramic Wafer Canja wurin Ƙarshen Effector yana ba da kwanciyar hankali na inji, tsabta, da juriya na lalata don sarrafa wafer na zamani. Ta hanyar haɗa ingantaccen aiki na alumina, ingantattun mashina, da ƙwaƙƙwaran karewa, Semixlab yana goyan bayan fas ɗin wafer na duniya don samun mafi girma yawan amfanin ƙasa, ƙarancin lahani, da tsayin lokaci na kayan aiki. Neman shawarar ku a kowane lokaci.
description
Ⅰ. Amfanin Abu Da Jiki
Semixlab Wafer Canja wurin Ƙarshen Effector an ƙera shi daga yumbu mai tsafta na Alumina (Al₂O₃), wanda aka ƙera shi don samar da ingantacciyar injuna da kwanciyar hankali a cikin mahallin sarrafa semiconductor.
An tsara wannan madaidaicin ɓangaren don tsafta mai girma, tsattsauran tsari, da tsayin daka ga plasma da iskar gas-wanda ya sa ya zama zaɓin da aka fi so don sarrafa wafer a cikin CVD, PECVD, etching, oxidation, da kayan aikin epitaxy.
Mabuɗin Abubuwan Amfani:
● Tsafta ≥ 99.5%: Yana tabbatar da gurɓataccen ƙarfe na ƙarfe na ƙarfe, yana riƙe da mutuncin wafer.
● Babban Tauri (Mohs ~ 9): Tsararren juriya na abrasion don maimaita wafer lamba.
● Ƙarfafawar thermal har zuwa 1000 ° C: Mafi dacewa don ayyukan canja wurin wafer mai zafi.
● Kyakkyawan Insulation na Wutar Lantarki: Adadin juriya> 10¹⁴ Ω·cm yana hana lalacewar ESD.
Utra-mai santsi mai laushi mai laushi (Ra ≤ 0.02 μm): Yanke yawan ƙarfin wafer murabba'i da ƙananan prefer.
● Ƙarfi Mai Ƙarfi da Ƙarfafawar Plasma: Yana jurewa HF, Cl₂, CF₄, da O₂ bayyanar plasma.
Idan aka kwatanta da madaidaicin ma'adini ko carbon composite, Alumina ceramics suna ba da ingantaccen ƙarfi, tsafta, da tsawon rai a ƙarƙashin maimaita yanayin zafi da injin motsa jiki.
Ⅱ. Kalubalen Tsari gama gari da Maganin Injiniya
| Challenge | Dalilin | Semixlab Injiniya Solutions |
| Ƙarshen Ƙarshe | urface roughness ko ƙananan fasa daga maimaituwa | Gilashin madubi (Ra ≤ 0.02 μm) da ingantaccen chamfering; na yau da kullum ultrasonic tsaftacewa |
| Wafer Slippage | Rashin daidaituwar juzu'i ko ƙarancin rarrabawar iska | Ingantaccen juzu'i na tsagi da ƙaramin rubutu don ingantaccen rikon wafer |
| Gina Cajin A tsaye | Rashin isassun caji a ƙarƙashin injin | Amfani da semiconductive Al₂O₃-TiO₂ composite don inganta sakin caji |
| Rushewar Plasma ko Harin Sinadarai | Ci gaba da bayyanar da iskar gas masu lalata | Amfani da Al₂O₃ (> 99.8%) mai yawa tare da SiC ko Y₂O₃ rufi don kariya daga saman |
| Lalacewar Girgizawar thermal | Canjin zafin jiki mai sauri tsakanin yankunan aiwatarwa | Ƙirar alumina mai kyau tare da ƙananan CTE da preheating ladabi don rage damuwa |
Aikace-aikace
Matsayi da Aikace-aikace a Tsarukan Semiconductor
Semixlab Wafer Canja wurin Ƙarshen Effector yana aiki a matsayin mahimmin mu'amala tsakanin tsarin sarrafa mutum-mutumi da ƙwanƙolin siliki mai laushi, yana tabbatar da daidaito, kwanciyar hankali, da jigilar cuta mara lalacewa tsakanin ɗakunan tsari.
Babban yanayin aikace-aikacen:
1. Wafer Loading and Unloading
Ana amfani da su a cikin LPCVD, PECVD, da tanderun oxidation, masu tasiri na alumina suna kula da daidaitawar wafer kuma suna kawar da micro-vibration yayin sakawa da cirewa daga ɗakunan sarrafawa.
2. Tsarin Gudanar da Robotic
Haɗewa cikin na'urorin canja wurin wafer mai sarrafa kansa, waɗannan masu tasiri suna ba da daidaiton matsayi mai maimaitawa, mai mahimmanci ga manyan kayan aiki da madaidaicin kayan wafer.
3. Tsari Tsari Mai Girma
Godiya ga kyakkyawan kwanciyar hankali na thermal, mai tasiri na alumina yana goyan bayan canja wurin wafer bayan jita-jita bayan matakan zafi mai zafi kamar haɓakar epitaxial da annealing.
4. Plasma and Etch Chamber Integration
Mai jure wa iskar gas mai amsawa da lalatawar plasma, mai tasirin alumina yana tabbatar da aiki mai ɗorewa a cikin etchers plasma da tsarin tsaftacewa.
5. Gurbacewa-Kwantar da Muhalli
Tsabtataccen tsaftar saman sa da rashin kuzarin sinadarai sun sa ya dace da nodes masu mahimmanci (<10nm), inda har ma gano gurɓataccen abu ke shafar yawan amfanin na'urar.
Amfanin da ya dace
Amfanin Ƙarshen Ƙarshen Ƙarshen Ƙarshen Semixlab
● Madaidaici: Ikon girman girman matakin ISO da kwanciyar hankali na ƙananan micron don amintaccen wafer lamba.
● Tsafta: 100% kayan da suka dace da ɗaki mai tsabta tare da ƙaƙƙarfan fitar da gas da gwaji.
● Keɓancewa: Akwai shi a cikin nau'ikan geometries da yawa (rikon gefuna, nau'in vacuum, nau'in cokali mai yatsa) don dacewa da tsarin robotic daban-daban.
● Amincewa: Tabbatar da aikin rayuwa a cikin manyan kayan aikin semiconductor a duk duniya.
Injiniyoyin Semixlab suna ci gaba da tsaftace sarrafa yumbu da fasahohin mai don tabbatar da daidaiton girman girman, ƙaramar ƙuruwar ƙwayar cuta, da tsawaita rayuwar kowane mai tasiri. Muna sa ido da gaske don samar muku da ƙwararrun samfura da samfuran da aka keɓance da mafita na fasaha.
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