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Mai hana graphite mai rufi CVD SiC don MOCVD Epitaxy
A Semixlab, mun ƙware wajen kera masu hana graphite mai rufi na CVD SiC waɗanda aka tsara don buƙatun hanyoyin epitaxy na MOCVD. A matsayin muhimmin sashi a cikin reactor, mai hana graphite yana tasiri kai tsaye ga daidaiton zafin jiki, ingancin fim, da kuma daidaiton tsari gabaɗaya yayin haɓakar epitaxial. Kayayyakinmu suna haɗa substrates na isostatic graphite mai tsabta tare da murfin silica mai yawa, mai kama da silica mai tururi (CVD) da aka ajiye (SiC), wanda ke ba da kyakkyawan juriya ga tsatsa, samar da barbashi, da lalacewar zafi a ƙarƙashin yanayin aiki mai tsanani. Muna fatan ƙarin bincike.
description
An gina na'urar kariya ta graphite mai rufi ta Semixlab CVD SiC don manufa ɗaya — don kiyaye epitaxy a kwance lokacin da aka tura komai zuwa iyaka. A cikin samar da MOCVD na zamani, inda yanayin zafi ya wuce 2000°C kuma tagogi masu sarrafawa suna ƙara zama kunkuntar, har ma da ƙananan rashin daidaiton saman na iya haifar da lahani a matakin wafer. A nan ne rufin SiC mai yawa da daidaito ya zama mahimmanci.
Ta hanyar haɗa graphite mai yawan yawa tare da tsarin adana tururin sinadarai mai ƙarfi, Semixlab yana samar da wani shafi wanda ke aiki akai-akai a cikin dogon zagayen samarwa, yana taimaka wa abokan ciniki su ci gaba da samar da amfanin gona maimakon sake daidaita shi akai-akai.
Ina Muhimmancinsa?
A yanayin samar da kayayyaki na gaske, ba a yin hukunci ga masu haifar da cutar ta hanyar yadda suke kama da juna ba - amma ta tsawon lokacin da suke kasancewa cikin kwanciyar hankali. A lokacin GaN ko SiC epitaxy, fallasa ga NH₃, H₂ da kuma yawan zafin jiki na ci gaba da kai hari kan saman murfin. Rufin da ke ƙasa da ƙasa yana fara nuna ƙananan fasa, zubar da ƙwayoyin cuta, ko ma wargajewa.
An ƙera murfin SiC na Semixlab don ya jure wa waɗannan yanayin gazawar. Tsarin ƙaramin abu mai yawa yana rage shigar iskar gas, yayin da mannewa mai ƙarfi tsakanin shafi da substrate na graphite yana hana barewa yayin zagayowar zafi mai maimaitawa. Wannan shine dalilin da ya sa abokan ciniki da yawa ba sa canzawa don aiki a rana ta farko - amma don daidaito bayan ɗaruruwan zagayowar.
Ɗabi'ar Abin Duniya A ƙarƙashin Matsanancin Yanayi
Ba a bayyana abin rufe SiC mai inganci da lamba ɗaya ba - yana magana ne game da yadda kayan ke riƙewa lokacin da komai ke kan gaba a cikin aikin.
A yanayin zafi sama da 2200°C, murfin yana buƙatar ya kasance cikakke, ba tare da nakasa ko lalacewa ba. A lokaci guda, yanayin saman yana da mahimmanci fiye da yadda yake a kan takarda. Idan saman ya yi tsauri sosai, kwararar iskar gas na iya zama mara ƙarfi; idan ya yi santsi sosai amma yana da ramuka a ciki, murfin ba zai daɗe ba ta hanyar maimaita zagayowar.
Semixlab ya mayar da hankali kan kiyaye wannan daidaito. Rufin yana da yawa don toshe shigar iskar gas, yayin da matakin ƙazanta yana raguwa sosai don guje wa shigar da canje-canje marasa so yayin epitaxy. A aikace, abin da wannan ke nufi abu ne mai sauƙi - saman yana da karko, kuma tsarin yana ci gaba da kasancewa daidai daga lokaci zuwa lokaci.
Kayan aiki na gaske da aka gina a kusa da su
Ana amfani da wannan samfurin sosai a cikin manyan dandamali na epitaxy, gami da tsarin reactor na duniya da na tsaye.
Maimakon bayar da wani ɓangare na gama gari, Semixlab yana aiki bisa ga yanayin aiki na ainihi - gami da yanayin zafin jiki, ƙirar kwararar iskar gas, da girman wafer - don tabbatar da dacewa daga farko.
Wadanne Abokan Ciniki Ke Samu Akan Lokaci?
Bayan lokaci, bambancin zai bayyana ba a cikin takamaiman bayanai ba, amma a cikin ayyuka.
Kwastomomi yawanci suna ba da rahoton raguwar kauri mai ƙarfi, ƙarancin ƙwayoyin cuta, da kuma tazara mai tsawo na kulawa. Maimakon maye gurbin ko daidaita tsari akai-akai, samarwa ya zama abin da ake iya faɗi - wanda a ƙarshe ke rage jimlar farashin mallakar.
Wannan yana da matuƙar muhimmanci musamman a aikace-aikacen da ake amfani da su a manyan na'urori kamar na'urorin wutar lantarki da samar da ƙananan LED, inda daidaito ke shafar riba kai tsaye.
Hanyar Keɓancewa
Kowace reactor tana aiki daban-daban, haka ma mai cutar da ke haifar da cutar.
Semixlab yana samar da mafita na musamman dangane da nau'in reactor, girman wafer, da buƙatun tsari. Daga inganta kauri na shafi zuwa daidaitawar lissafi, kowane daki-daki ana daidaita shi don dacewa da ainihin yanayin samarwa - ba kawai zane-zane ba.
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