Keɓaɓɓen sic mai rufin wafer susceptor

SiC mai rufaffiyar wafer susceptor abu ne mai mahimmanci a cikin masana'antar semiconductor, musamman a cikin hanyoyin haɓaka epitaxial kamar MOCVD, PECVD, da CVD. Yana aiki azaman tsayayye mai ɗaukar nauyi wanda ke goyan bayan wafers a ƙarƙashin yanayin zafi mai zafi, ɓarna, da vacuum, yana tabbatar da canja wurin zafi iri ɗaya da sarrafawa mara lalacewa. Ta hanyar amfani da murfin CVD SiC akan babban mai ɗaukar hoto mai tsafta, mai cutarwa ya haɗu da kyakkyawan aikin zafi tare da ingantaccen juriyar sinadarai - yana sa ya zama dole don samar da semiconductor na gaba.

Haɗin Kayan Abu & Abubuwan Jiki

SiC Wafer Susceptor na Musamman daga Semixlab an ƙera shi ta amfani da kayan masarufi guda biyu:

Rahoton da aka ƙayyade na CVD

●Tauri na musamman (Mohs 9+) da karko

●Maɗaukakin tsarki (> 99.999%) don rage ƙwayar ƙwayar cuta

●Kyawawan rashin kuzarin sinadarai akan iskar gas (HCl, NH₃, H₂, da sauransu)

●Tsarin zafi har zuwa *1600°C

● M, uniform shafi kauri ga dogon sabis rayuwa

Babban Tsarkakkun Graphite Susceptor

●High thermal watsin domin barga zazzabi rarraba

● Tsarin nauyi mai sauƙi idan aka kwatanta da yumbu na monolithic

●Madaidaicin-machid don saduwa da tsananin wafer flatness bukatun

● Ƙarfin inji mai ƙarfi a ƙarƙashin hawan hawan zafi

Waɗannan kaddarorin haɗe-haɗe suna sa mai rufin SiC mai juriya sosai ga girgizar zafi, yashwar plasma, da gurɓataccen ƙwayar cuta, yana tabbatar da daidaiton ingancin wafer.

Aikace-aikace a cikin Semiconductor Processing

Ana amfani da susceptor na SiC mai rufaffiyar wafer a cikin ci-gaba na matakai na semiconductor, musamman a:

● Girman Wafer Epitaxial (Masana Epi Wafer): Yana tabbatar da dumama iri ɗaya kuma yana rage girman ruku'un wafer yayin jibgewar epitaxial na SiC, GaN, GaAs, da sauran mahaɗan semiconductor.

●Tsarin MOCVD & CVD: Yana ba da tsayayyen sinadari, saman tsafta mai tsayi don shigar da sikirin fim iri ɗaya.

●LED & Ƙarfin Ƙarfafa Ƙwararrun Ƙwararru: Yana goyan bayan manyan wafers na LED mai haske da faffadan kayan bandgap a cikin ɗakunan girma masu zafi.

●Maɗaukakin Zazzabi & Yaduwa: Yana kiyaye kwanciyar hankali na tsari a ƙarƙashin maimaita yanayin zafi yayin da yake hana gurɓatawa.

Ta hanyar inganta canjin zafi da kuma kiyaye mutuncin saman, mai cutarwa kai tsaye yana rinjayar amfanin wafer, daidaito, da raguwar lahani-yana mai da shi muhimmin sashi mai mahimmanci a cikin layin tsari na epitaxial.

Abubuwan Gasa Semixlab

A Semixlab, muna samar da fiye da daidaitattun abubuwan haɗin gwiwa-muna isar da ingantattun hanyoyin da suka dace da buƙatun masu masana'antun semiconductor:

Kwarewar Keɓancewa

Zane da ƙera abubuwan maye a cikin girma daban-daban, siffofi, kauri mai kauri, da geometries don dacewa da takamaiman na'urorin MOCVD/CVD.

SiC Mai Rufin Wafer

Silicon Carbide mai rufi Wafer Susceptor

Shawarar Fasaha

Ƙwararrun injiniyoyi suna ba da ƙayyadaddun shawarwarin tsari don haɓaka yawan amfanin ƙasa da tsawaita rayuwar masu cutarwa.

Gwajin Yanayi Mai Tsanani

Duk samfuran suna fuskantar ƙaƙƙarfan gwaji don kwanciyar hankali na zafi, juriya na sinadarai, da ƙarfin injina ƙarƙashin yanayin tsari na gaske.