SiC Mai Rufin Graphite Barrel Susceptor

A cikin masana'antar fili-semiconductor na zamani-musamman SiC da GaN epitaxy - ingancin yanayin yanayin zafi a cikin na'ura mai ɗaukar hoto kai tsaye yana ƙayyade daidaito, ƙarancin lahani, da maimaitawar fina-finan epitaxial. Semixlab's SiC Coated Graphite Barrel Susceptor an ƙera shi don saduwa da ƙaƙƙarfan buƙatun masu zafin jiki na CVD masu zafi da aka yi amfani da su wajen samar da na'urar wutar lantarki mai faɗi. Ta hanyar haɗa graphite mai tsafta tare da ingin SiC ɗin da aka ƙera daidai, mai cutarwa yana ba da daidaiton yanayin zafi na musamman, kwanciyar hankali na sinadarai, da amincin injina cikin dogon lokaci, matakan zafi mai zafi.

A cikin jigon aikin sa shine keɓaɓɓen keɓaɓɓen kayan aikin Semixlab, wanda ke haɓaka fitarwa da amsawar zafi mai mahimmanci don daidaita yanayin zafin matakin wafer. Rufin SiC yana aiki azaman shingen inert na sinadarai a kan gurɓatattun sinadarai na chlorinated da aka saba amfani da su a cikin SiC epitaxy, yana hana ɓarna graphite da kawar da babban tushen samar da barbashi. Wannan kariyar yana tabbatar da ƙananan matakan gurɓatawa kuma yana taimakawa kula da yanayi mai tsabta ko da a ƙarƙashin yanayin tsari mai tsanani wanda ya wuce 1500 ° C. An inganta juzu'i na ganga don ƙirƙirar barga mai daidaitacce kuma daidaitaccen filin kwararar iskar gas a cikin wafers da yawa, rage bambancin iyaka da ba da damar ingantacciyar kauri na fim da daidaiton doping a cikin masu samar da wutar lantarki mai yawa.

Daga madaidaicin amincin inji, Semixlab's SiC mai rufi mai rufi yana riƙe da amincin tsari a cikin sake zagayowar yanayin zafi da babban lodin wafer. Injiniyan shafi kauri, micro-crystalline SiC tsarin, da thermal-fadada karfinsu tare da graphite substrate aiki tare don rage girman lalacewa da kuma hana micro-barbashi zubar a kan Extended sabis rayuwa. Wannan kai tsaye yana ba da gudummawa ga haɓakar yawan amfanin ƙasa da ƙarancin kulawa don kayan aikin epitaxy.

Don fabs suna haɓaka samar da na'urar wutar lantarki ta SiC, mai ɗaukar hoto yana aiki azaman mai mahimmanci mai ba da damar ingantaccen ingancin epi. Yana daidaita rarraba zafin jiki na wafer, yana kula da haɗaɗɗun zafin jiki mai sarrafawa, garkuwa da abubuwan da ba a so ba, kuma yana goyan bayan yanayin maimaituwa, babban yanayin dauki. Ta hanyar wannan haɗin dorewa, tsabta, da daidaitaccen zafin jiki, Semixlab's Barrel Susceptor yana taimaka wa masana'antun su cimma matsananciyar sarrafa tsari, ingantacciyar aikin lantarki na yadudduka na epitaxial, da mafi girman amincin SiC MOSFETs, diodes, da na'urorin wutar lantarki.

An ƙera shi don dacewa tare da manyan dandamali na SiC epitaxy na tsaye da kwance, Semixlab SiC Coated Graphite Barrel Susceptor yana da kyau don manyan layukan samarwa masu girma waɗanda ke neman abubuwan haɓaka na tsawon rai da aikin da ake iya faɗi. Ana kera kowace naúrar ƙarƙashin ƙaƙƙarfan cancantar kayan aiki da daidaitattun ma'auni, yana tabbatar da daidaiton aiki a cikin batches. Tare da ƙwarewar Semixlab a cikin kayan haɓakawa da injiniyan tsarin semiconductor, samfurin yana ba da fabs tare da amintacce, ingantaccen tsari wanda ke goyan bayan haɓakar ma'auni a cikin kayan sarrafawa, daidaiton wafer, da lokacin kayan aiki-yana magance buƙatun aikin masana'antu da la'akari na dogon lokaci-na-mallaka.