Tire ɗin Graphite RTP mai Rufi na CVD SiC

Tsarin RTP yana sanya tiren tallafi na wafer a cikin abin rufewa. A kowane zagaye, tiren yana dumamawa cikin sauri sannan ya huce da sauri - kuma hakan yana faruwa sau dubbai a tsawon rayuwarsa. Idan ba a kula da kayan ko tsarin ƙera su da kyau ba, wannan girgizar zafi mai maimaitawa na iya sa tiren ya karkace ko ya rasa siffarsa a hankali.

Hanyarmu ba wai kawai game da jure yanayin zafi mai tsanani ba ne - yana game da tabbatar da cewa wafers ɗin suna da ƙarfi kuma suna da ɗumi daidai gwargwado, suna zagayawa bayan zagaye.

Me yasa SGL6510 Graphite?

To me yasa muke zaɓar SGL6510? Domin substrate shine ginshiƙin dukkan tiren. SGL6510 wani nau'in graphite ne mai tsari iri ɗaya, babban ƙarfin wutar lantarki, da ƙarancin faɗaɗa zafi - duk waɗannan suna taimakawa rage damuwa ta ciki da kuma kiyaye tiren ya kasance mai daidaito a tsawon lokaci. Wannan yana da mahimmanci musamman ga tiren siriri waɗanda ke wucewa ta yanayin zafi mai yawa.

Bayan mun na'urar da graphite ɗin zuwa siffar da ake buƙata, sai mu shafa wani kauri mai kauri na CVD SiC. Wannan kariyar tana kare saman daga iskar shaka, tsatsa, da lalacewa, kuma tana rage yawan samar da ƙwayoyin cuta.

Faɗin jiki Yana da Muhimmanci Fiye da Zafin Jiki

A gaskiya ma, yawancin mutane suna ɗauka cewa babban ƙalubalen shine ko tiren zai iya jure zafin 700°C. Amma ba haka lamarin yake ba - ainihin ciwon kai shine nakasa. Tiren graphite siriri na iya karkacewa yayin aikin injin, yayin rufewa, ko kuma kawai saboda dumama da sanyaya akai-akai. Ko da ƙaramin canji a siffar zai iya shafar yadda wafer ɗin yake zaune da kuma yadda zafin yake yaɗuwa daidai gwargwado.

Shi ya sa kula da lanƙwasa yana ɗaya daga cikin manyan abubuwan da muke fifita a duk lokacin ƙera. Muna amfani da graphite mai inganci na SGL6510 tare da tsari na ciki iri ɗaya, muna kiyaye juriyar injin kafin a shafa, muna amfani da tsarin CVD SiC mai ƙarancin damuwa, kuma muna duba lanƙwasa bayan kowane babban matakin samarwa. Sakamakon: yawancin tirenmu suna samun lanƙwasa ≤0.50 mm, kuma da yawa suna fitowa ko da lanƙwasa.

Ayyukan Material

Rufin CVD SiC ba kawai siririn harsashi ba ne - yana samar da shinge mai kauri da tauri wanda ke tsawaita rayuwar graphite da ke ƙasa. A zahiri, hakan yana nufin ƙarancin ƙwayoyin cuta, juriya mai kyau ga iskar shaka da tsatsa, da kuma juriya mai kyau ga girgizar zafi. An gina waɗannan tiren ne don su daɗe a cikin ɗakunan tsaftacewa na semiconductor.

Kauri na rufinmu na yau da kullun shine 100 ± 20 μm, amma za mu iya daidaita hakan idan aikace-aikacenku ya buƙaci wani abu daban.

Me yasa za a zabi Semixlab?

Yin tiren RTP mai inganci ya fi shafa graphite da SiC kawai. Idan tiren ya yi siriri, kowane daki-daki yana da mahimmanci - daidaiton injin, damuwa game da rufi, da kuma lanƙwasa na ƙarshe. Mun shafe shekaru muna aiki da fenti mai daidaici na graphite da CVD SiC, don haka mun fahimci yadda za mu daidaita waɗannan abubuwan. Sakamakon ƙarshe shine tiren da ke riƙe da yanayinsa, yana kasancewa mai tsabta, kuma yana ba ku tsawon rai mai amfani a samarwa.

● Samfura: Tiren Graphite RTP Mai Rufi na CVD SiC

● Kayan Tushe: SGL6510 Isostatic Graphite

● Rufin Sama: CVD Silicon Carbide (SiC)

● Kauri na Rufi: 100 ± 20 μm (wanda za a iya keɓance shi)

● Matsakaicin Zafin Aiki Mai Ci Gaba: har zuwa 1400°C

● Yanayin Zafin Aiki na yau da kullun: kusan 700°C

● Faɗi: ≤0.20 mm (ya danganta da ƙira)

● Tsarin Musamman: akwai

Za ku sami waɗannan tire a cikin nau'ikan hanyoyin semiconductor iri-iri - RTP, RTA, tallafin wafer mai zafi mai yawa, da ƙera ɗaki mai tsafta. Babban aikinsu abu ne mai sauƙi: riƙe wafer ɗin da kyau kuma canja wurin zafi akai-akai a duk tsawon zagayowar zafi.

1. Me yasa lanƙwasa take da muhimmanci sosai?

Domin tiren yana goyon bayan wafer ɗin kai tsaye yayin dumama da sanyaya cikin sauri. Idan ya ɗan lanƙwasa ko da kaɗan ne, wafer ɗin ba zai iya zama daidai ba, wanda zai iya haifar da rarraba zafi da kuma maimaitawa.

2. Shin tiren zai iya aiki akai-akai a zafin 700°C?

Eh – 700°C yana cikin yankin jin daɗinsa. Ana kimanta tiren don ci gaba da amfani da shi har zuwa kusan 1400°C, don haka 700°C ba matsala ba ce.

3. Wane kauri na shafi kake bayarwa?

Ma'auninmu shine 100 ± 20 μm, amma za mu iya daidaita shi idan aikace-aikacenku yana buƙatar kauri daban.

4. Shin kuna yin tiren RTP na musamman?

Hakika. Za mu iya yin aiki daga zane-zanenku don samar da tire masu girma dabam-dabam, kauri mai laushi, buƙatun lanƙwasa, da duk wani takamaiman bayani da kuke buƙata.