Zoben Mai Rufi na TaC

Zoben Deflector mai Rufi na TaC na Semixlab wani sinadari ne mai matuƙar daidaito wajen sarrafa gurɓatawa da kuma daidaita iskar iska wanda aka tsara don yanayin aikin semiconductor epitaxy da CVD. A cikin waɗannan muhallin, daidaiton wafer, kwanciyar hankali na sinadarai na ɗakin, da kuma juriyar kayan aiki kai tsaye yana ƙayyade yawan amfanin masana'antu da lokacin aiki na kayan aiki. An sanya wannan zoben deflector a kusa da gefen wafer ko iyakar substrate, yana aiki azaman na'urar siffanta kwararar iskar gas mai mahimmanci yayin haɓakar epitaxial na Si, SiC, da GaN, yana ba da damar sarrafa daidaito kan rarrabawar abubuwan da ke haifar da amsawa da kuma daidaita yanayin zafin filin saman wafer.

A cikin ɗakunan epitaxial masu zafi sosai, inda hydrogen, iskar gas mai ɗauke da chlorine, hydrocarbons, da ammonia ke amsawa a yanayin zafi da ke kusantowa ko wuce 1500 °C, ingancin rufin kayan aikin ɗakin ya zama muhimmin abu wajen tantance ingancin fim ɗin siriri. Tantalum carbide (TaC), tare da wurin narkewa mai matuƙar zafi na kusan 3880 °C da juriyar sinadarai na musamman, yana samar da shinge mai ƙarfi daga lalacewar abu, fashewar saman, ko gurɓatar ƙarfe, don haka yana kiyaye yanayin ajiya mai sarrafawa akan tsawan zagayowar samarwa.

Ta hanyar tsarin karkatar da iskar da ke gudana, Zoben Deflector Mai Rufi na TaC yana tsara kuma yana daidaita layin iyaka na iskar gas mai amsawa, yana rage bambance-bambancen kauri na gefen, yana iyakance tarin fina-finai masu layi da yawa, da kuma kare wafer daga gurɓataccen barbashi wanda ya samo asali daga bangon ɗaki ko lalacewar kayan aiki. Wannan daidaita saurin kwararar iska yana da mahimmanci don rage lahani na epitaxial kamar su nakasassu na basal plane, kurakurai na tara, rami, da rashin daidaito na gefen fim.

A cikin tsarin CVD da ALD, yawan fallasa ga abubuwan da suka fara lalata da muhallin da aka inganta a cikin plasma na iya haifar da tsatsa na sassan ɗakin da ba a yi musu magani ba, yayin da saman da aka rufe da TaC yana aiki azaman garkuwar sinadarai marasa aiki, yana kiyaye tsaftar ɗakin, rage yawan kulawa, da kuma rage jimlar kuɗin mallakar masana'antun ƙera wafer mai yawan girma. Tsarin rufin mai yawa da ƙarancin ramuka na rage zubar da ƙwayoyin cuta kuma yana hana fashewar lu'ulu'u da girgizar zafi ke haifarwa, yana ba da damar ci gaba da aiki ba tare da lalata amincin ɗakin ko tsaftar wafer ba.

Ana ƙera zoben karkatarwa mai rufi na Semixlab TaC bisa ga ƙa'idodin mannewa mai sarrafawa da kuma tabbatar da daidaiton tsarin aiki don tabbatar da ƙarfin mannewa mai daidaito, daidaiton kauri, da kuma dacewa da tsari a cikin dandamali daban-daban na tanda mai zafi da na epitaxial. Ta hanyar haɗa aikin kayan aiki, injiniyan kwararar iskar gas, da ƙira mai dogaro da aminci, haɗa zoben karkatarwa mai rufi na Semixlab TaC sun zama muhimmin abu wajen cimma ingantaccen aiki na dogon lokaci, yawan amfanin wafer mai yawa, da juriyar aiki a masana'antar semiconductor na gaba. Muna fatan zama abokin tarayya na dogon lokaci a China.