Zobba Masu Tsarkakakken Isostatic Graphite

Zoben Hatimin Graphite Mai Tsabta Mai Tsabta daga Semixlab an ƙera su ne daga graphite mai matuƙar tsarki wanda aka matse shi da sassauƙa, waɗannan zoben hatimin suna ba da aikin hatimin da ke da kwanciyar hankali, ƙarancin gurɓatawa wanda ke tallafawa amincin tsari, daidaiton yawan aiki, da lokacin aiki na kayan aiki a duk faɗin ci gaba da aka yi a gaban wafer.

A cikin tsarin epitaxy, inda ingantaccen sarrafa kwararar iskar gas, kwanciyar hankali na matsin lamba, da daidaiton zafi yake da mahimmanci, Zoben Sealing na Semixlab mai Tsarkakakken Isostatic Graphite yana taka muhimmiyar rawa wajen kiyaye amincin reactor a yanayin zafi mai ɗorewa wanda galibi ya wuce 1000 °C. An sanya su a mahaɗar ɗakin, iyakokin rufewa, da haɗin gwiwa masu juyawa ko tsayayye a cikin yankin zafi, waɗannan zoben sealing suna nuna ƙarancin faɗaɗa zafi na isotropic, wanda ke ba su damar kiyaye daidaiton girma yayin zagayowar zafi mai maimaitawa. Ƙananan ƙazanta na ƙarfe da ke cikinsu yana rage haɗarin haɗa dopant da ba da gangan ba ko gurɓatar ƙarfe, yana taimakawa wajen tabbatar da kauri ɗaya na Layer epitaxial, bayanan doping da aka sarrafa, da kuma haɓakar kristal mai inganci a cikin hanyoyin epitaxy na silicon da compound semiconductor.

A aikace-aikacen CVD, LPCVD, da PECVD, sassan rufewa suna fuskantar haɗuwa da yanayin zafi mai yawa, iskar gas mai guba, da iskar gas mai lalata, kuma a wasu lokuta yanayin plasma. Zoben rufewa na Semixlab mai tsarki mai tsarki ana amfani da shi sosai a cikin hatimin ƙofar ɗaki, tsarin keɓewar iskar gas, da yankunan canzawa tsakanin yankuna masu zafi da sanyi na reactor. Juriyar sinadarai na graphite mai tsarki yana ba da damar aiki mai dorewa a gaban iskar gas mai ƙarfi kamar HCl, NH₃, da masu gabatarwa na halogen, yayin da tsarin isotropic mai yawa, mai yawa, yana rage samar da barbashi da lalacewar injiniya a tsawon rayuwar sabis. Idan aka kwatanta da mafita na rufewa na ƙarfe, zoben rufewa na graphite suna ba da juriya ga tsatsa da gajiyar zafi, suna ba da gudummawa ga tsawon tazara na kulawa da inganta maimaita aiki a cikin masana'antu masu girma.

Yaɗuwar zafin jiki mai yawa, iskar shaka, da kuma saurin sarrafa zafi suna sanya buƙatu masu tsauri kan aikin hatimi saboda yanayin zafi mai tsanani, saurin gudu na zafi, da kuma yawan zagayowar aiki. A cikin waɗannan muhallin, Zoben Hatimin Graphite Mai Tsabta na Semixlab suna kiyaye daidaiton hatimi a yanayin zafi da ya wuce 1100 °C, suna tallafawa ikon sarrafa yanayi mai ɗorewa a cikin bututun tanderu da ɗakunan RTP. Halayen injina iri ɗaya da aka bayar ta hanyar matsi na isostatic suna taimakawa hana yawan damuwa na gida, fashewar micro, da karkacewar hatimi yayin dumama da sanyaya cikin sauri, don haka suna ba da gudummawa ga daidaiton bayanan watsawa na dopant, haɓakar oxide iri ɗaya, da sakamakon aikin zafi mai maimaitawa waɗanda ke da mahimmanci ga ci gaba da kera na'urorin dabaru da ƙwaƙwalwa.

A cikin tsarin Etch, gami da aikace-aikacen etching busassun da ke amfani da sinadarai masu tushen halogen da muhallin da ke taimakawa wajen amfani da plasma, ana buƙatar zoben hatimi don kiyaye ingancin injin yayin da ake iyakance samar da barbashi da lalata sinadarai. Zoben Hatimin Graphite Mai Tsabta na Semixlab galibi ana sanya su a yankunan da ba su da kai tsaye a cikin plasma, kamar hanyoyin hatimin gefen ɗaki da yankunan keɓewa na tsari. Idan aka haɗa su da ma'aunin saman da ya dace ko rufin kariya, waɗannan zoben hatimi suna ba da juriya mai aminci ga iskar gas mai lalata da damuwa mai zafi, suna tallafawa yanayin ɗakin da ya dawwama da rage haɗarin asarar amfanin gona da ke da alaƙa da gurɓatawa.

An ƙera shi da mai da hankali kan tsarkin abu, kwanciyar hankali na tsari, da kuma aminci na dogon lokaci, dacewa da Zoben Sealing na Semixlab mai tsarki tare da fasahar rufewa ta zamani da haɗa shi cikin tsarin kayan aikin semiconductor mai rikitarwa ya sa su zama mafita mai aminci ga manyan hanyoyin aiki da suka girma. Ta hanyar samar da aikin hatimi mai daidaito a ƙarƙashin yanayin aiki mafi wahala, Semixlab yana tallafawa masana'antun semiconductor don cimma babban yawan amfanin ƙasa, ingantaccen amfani da kayan aiki, da ƙarancin farashin mallaka. Muna fatan zama abokin tarayya na dogon lokaci a China.