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Jikin Graphite mai tsauri
Kerarre daga ultra-high-tsarki mai zayyana carbon, Semixlab Rigid Graphite Felt babban kayan aikin rufi ne na musamman wanda aka kera don ci gaban kristal guda ɗaya na SiC ta hanyar PVT. Ƙarfin wutar lantarki mai ƙarancin ƙarancin zafi yana tabbatar da daidaitaccen iko na radial da axial zafin jiki gradients, yayin da tsayayyen tsarinsa yana kiyaye kwanciyar hankali na inji a ƙarƙashin matsanancin yanayin zafi da ya wuce 2000 ° C. Ta hanyar rage hasara mai zafi da adana filayen thermal iri ɗaya a kusa da ɓangarorin sublimation, RGF yana rage ɓarnawar jirgin sama na basal, kurakurai, da samuwar micropipe, yana haifar da mafi girman ingancin 4H- da 6H-SiC boules.
description
Semixlab Rigid Graphite Felt (RGF) an ƙirƙira shi azaman mahimmin rufin zafin jiki mai zafi da yanayin sarrafa zafin jiki don haɓakar Jirgin Jirgin Jiki (PVT) na SiC guda lu'ulu'u. An tsara shi don amfani a cikin samar da wafer na 4H- da 6H-SiC na gaba, wannan tsattsauran ra'ayi ya haɗu da ƙarancin ƙarancin zafin jiki, ingantaccen tsarin tsari, da tsaftar sinadarai na musamman, yana mai da shi kayan ginshiƙi a cikin manyan tanderu na SiC. Aikace-aikacen sa yana tabbatar da daidaitaccen iko na gradients na zafi, yanayin haɓakar haɓaka, da ingantaccen ingancin kristal a cikin zagayowar samarwa na dogon lokaci.
A cikin tsarin SiC PVT, kiyaye daidaitaccen filin zafi iri ɗaya shine mafi mahimmanci ga samun lu'ulu'u ɗaya mara lahani. The Graphite Rigid Felt yana aiki azaman rufin tanderu na farko, kewaye da crucible sublimation da kuma yanayin filin zafi. Ƙarƙashin yanayin zafinsa yana rage asarar zafin da ba a so, yana riƙe maƙasudin zafin zafin jiki tsakanin tushen SiC da kristal iri. Ta hanyar sarrafa bayanan yanayin zafin jiki na radial da axial, RGF yana rage girman samuwar ɓarkewar jirgin sama, kurakuran tari, da micropipes, yana tasiri kai tsaye ga amincin tsarin da aikin lantarki na sakamakon SiC wafers.
Bayan iyawar sa na rufin zafi, ƙaƙƙarfan tsarin graphite na Semixlab yana ba da kwanciyar hankali na inji a cikin yanayin zafin da ya wuce 2000°C. Ba kamar masu sassauƙa ko taushi ba, RGF yana kiyaye sifar sa ƙarƙashin dogon hawan keken zafi, yana hana rugujewa ko nakasar da zai iya dagula filin zafi ko yin sulhu a rayuwar tanderu. Rashin ƙarancin sinadarai yana tabbatar da sakin ɗan ƙaramin ɗanɗano kuma yana guje wa gurɓataccen sinadari na SiC, wanda ke da mahimmanci don samar da babban juriya don na'urorin lantarki da aikace-aikacen na'ura mai faɗi.
Wanda aka kera ta amfani da carbon hoto mai tsafta mai tsafta da ingantattun dabarun haɓakawa, Semixlab Graphite Rigid Felt yana baje kolin iri ɗaya, kyakkyawan kwanciyar hankali mai girma, da dorewa na dogon lokaci. Haɗin aikin sa na thermal da rigidity na inji yana ba da damar masana'antar semiconductor don cimma daidaiton ƙimar girma, bayanan martabar zazzabi, da rage raguwa a cikin tsarin PVT. Ta inganta ingantaccen yanayin zafin wuta, RGF kuma yana ba da gudummawa ga tanadin makamashi yayin haɓaka daidaiton wafer da yawan amfanin ƙasa.
Semixlab's Rigid Graphite Felt yana ba da aiki, tsabta, da kwanciyar hankali na tsari da ake buƙata don tallafawa haɓakar siC guda ɗaya mai inganci, samar da masana'antun tare da ingantaccen kayan aiki don samar da wafer na zamani na gaba, tsawaita rayuwar tanderun, da ingantaccen sarrafa zafi a cikin matsanancin yanayin zafi.
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