SiC Ceramic Robotic Arm

Aikace-aikace Key

The SiC Ceramic Robotic Arm daga Semixlab Semiconductor an ƙera shi don isar da aminci da tsabta wanda bai dace ba a cikin matakai da yawa na sarrafa wafer semiconductor. Aikace-aikacen sa ya bambanta daga gaba-gaba zuwa matakai na baya-baya, inda daidaito, sarrafa gurbatawa, da amincin kayan aiki ke da mahimmancin manufa.

A cikin tsarin sarrafa wafer da tsarin canja wuri, hannun mutum-mutumi na SiC yana tabbatar da kwanciyar hankali da motsi mara amfani na wafer tsakanin ɗakunan daki, tashar jiragen ruwa, da FOUPs. Madaidaicin-santsi, fuskar madubi mai gogewa yana hana ƙananan scratches kuma yana kawar da gurɓataccen gurɓataccen abu yayin motsi na mutum-mutumi mai sauri. Kwanciyar hankalinsa a ƙarƙashin vacuum da damuwa na zafi yana ba shi damar kiyaye daidaiton matsayi na ƙasa da millimeter, wanda ke da mahimmanci don daidaitawar wafer ta atomatik da shirye-shiryen lithography na ci gaba.

A yayin aiwatar da CVD da PECVD, hannu yana nuna juriya na musamman ga mahallin plasma da iskar gas kamar Cl₂ da HF, yana ba da damar amfani da kai tsaye a cikin tsarin ajiya waɗanda ke sarrafa silicon, SiC, ko GaN wafers. Ko da a ƙarƙashin tsayin tsayin daka zuwa yanayin zafi sama da 1000 ° C, tsarin yumbura na SiC yana kiyaye ƙarfin injinsa da lissafi, yana ba da amintaccen canja wurin wafer zuwa ciki da waje na ɗakuna masu zafi tare da ƙarancin kulawa.

A cikin etching da ion implantation modules, hannun SiC yana aiki ba tare da aibu ba a cikin yanayin halogen na plasma mai ƙarfi inda abubuwan ƙarfe ko na tushen polymer yawanci za su lalace. Rashin rashin kuzarinsa yana hana lalata da zubar da barbashi, yana tabbatar da kwanciyar hankali na dogon lokaci da ingantaccen kayan aiki. Hakazalika, yayin aiwatar da iskar oxygen, cirewa, da watsawa, ƙarancin haɓaka haɓakar haɓakar zafi na hannu yana hana nakasu da kiyaye daidaiton wafer duk da matsanancin hawan keke.

Hakanan ana karɓar hannun SiC yumbura na robotic a cikin CMP, tsaftacewa, da aikace-aikacen aiwatarwa, inda duka dacewa da sinadarai da kaddarorin tsaftar tsafta suna da mahimmanci. Yana tsayayya da acidic da alkaline masu tsaftacewa, yana hana ionic leaching, kuma yana kawar da gurɓataccen ƙarfe-yana ba da gudummawa ga ingantaccen ingancin wafer da rage lahani.

A ƙarshe, a cikin masana'antar sarrafa wutar lantarki ta SiC da GaN, wannan hannu na mutum-mutumi ya zama mai ba da gudummawa mai mahimmanci ga na'urorin bandgap mai faɗi na gaba. Daidaitawar kayan sa tare da SiC epitaxial wafers da ma'aunin zafi mai zafi yana rage ƙarancin giciye, haɓaka daidaiton tsari, kuma yana tallafawa canjin masana'antu zuwa manyan ayyuka, na'urori masu ƙarfi. Ko a cikin canja wuri, epitaxy, ko tsarin yanayin zafi mai zafi, Semixlab SiC Ceramic Robotic Arm yana tabbatar da daidaito, tsabta, da tsawon rai a ƙarƙashin mafi ƙarancin yanayin aiwatar da semiconductor.

Aikace-aikace Ketare Layin Semiconductor

● 200mm / 300mm wafer aiki dandamali

● Ƙirƙirar na'urar wutar lantarki ta SiC / GaN

● Tsarukan canja wuri mai zafi mai zafi

● LPCVD, PECVD, Epi, da kayan aikin RTP

Babban Amfanin Material

An gina shi daga tukwane na SiC mai ɗimbin yawa, hannun mutum-mutumi yana ba da:

● Ƙarfafawar thermal har zuwa 1200 ° C don tanderun wuta da tsarin epitaxial.

●Mafi girman juriya na sinadarai zuwa HF, Cl₂, O₃, da sauran iskar gas.

● Tsaftataccen aiki mai tsafta tare da ƙarancin ƙwayar ƙwayar cuta, manufa don yanayin 1 Class.

● Ƙarƙashin haɓakar zafi yana tabbatar da daidaiton juzu'i na ƙananan millimeters.

● Rufin SiC na zaɓi na zaɓi don kariya ta ESD da sarrafa fitarwa na lantarki.