Silicon Carbide Ceramic Wafer Boat

Silicon Carbide Ceramic Wafer Boat babban aiki ne mai ɗaukar kayan aiki wanda aka tsara don masana'antar semiconductor da tsarin makamashi na hotovoltaic. An yi shi da kayan yumbu mai tsafta na silicon carbide (SiC), wanda aka yi shi ta hanyar ci-gaba na sintering. Yana da kyakkyawan juriya na zafin jiki, kwanciyar hankali sinadarai da ƙarfin injina, kuma ya zama ainihin abubuwan da ake amfani da su a cikin watsa wafer, haɓakar zafin jiki mai girma da sauran matakan daidaito.

1. Kwanciyar hankali a cikin matsanancin yanayi

Tsarin kwayoyin halitta na sic ceramics yana ba shi kwanciyar hankali mai tsananin zafi, wanda zai iya kiyaye amincin tsarin sa a cikin yanayin yanayin zafi mai ci gaba na 1650°C. Idan aka kwatanta da ma'adini na al'ada ko kayan alumina, ƙimar faɗaɗawar thermal na sic boats yayi ƙasa sosai (kawai 4.5×10).^-6/°C), yadda ya kamata wajen gujewa nakasawa ko fashewa sakamakon canjin zafin jiki kwatsam. A cikin masana'antar semiconductor, wannan kadarorin na iya rage rarrabuwar kawuna na wafer a cikin babban tsarin zafin jiki da haɓaka yawan amfanin ƙasa.

2. Juriya na lalata mara misaltuwa

Silicon carbide yumbu yana nuna juriya mai ƙarfi ga acid mai ƙarfi (kamar hydrofluoric acid, sulfuric acid), tushe mai ƙarfi da iskar gas (Cl₂, O₂). Ko da a cikin sulfur ko halogen yanayi a 1400 ° C, saman ya kasance mai santsi kuma ba tare da lalata ba, yana tabbatar da cewa babu wani gurɓataccen abu da ya rage a saman wafer.

3. Tsawon rayuwa da fa'idojin tattalin arziki

Ta hanyar tsarin jiyya na musamman na farfajiyar, juriya na siliki carbide jirgin ruwan ya fi sau 15 sama da na kayan gargajiya. Ainihin gwajin ya nuna cewa bayan 1000 hawan keke a cikin 1400 ° C hadawan abu da iskar shaka yanayi, da surface roughness ne har yanzu m fiye da 0.2μm na Ra, da kuma juya sau iya isa 5-8 sau na na talakawa yumbu jiragen ruwa, wanda ƙwarai rage mita na kayan aiki rufe da sauyawa, da kuma m kudin ceto ne a kan 30%.

Ƙarin Bayanan:

1. Sauran sunayen: silicon carbide crystal jirgin ruwa, semiconductor yumbu m.

2. Aikace-aikacen: An yi amfani da shi a cikin yaduwar zafin jiki mai girma, oxidation da annealing tsari a cikin masana'antu na semiconductor don ɗaukar wafer silicon da tabbatar da rarraba zafi na uniform.

3. Core sigogi: tsarki ≥99.99%, matsakaicin zafin jiki juriya na 1500 ℃, low thermal fadada coefficient (4.5 × 10-6 / ℃), karfi thermal girgiza juriya.

Babban zafin jiki zafi magani na semiconductor wafers (oxidation, annealing, doping). 

Photovoltaic masana'antu wafer shafi da sintering.

Matsanancin zafin jiki mai ƙarfi: juriya na dogon lokaci zuwa 1500 ° C babban zafin jiki, babu nakasawa ko raguwar aiki.

Ƙananan ƙirar ƙira: babban kayan tsabta + tsari mara amfani, guje wa gurɓataccen ion ƙarfe.

Dogon rayuwa: kyakkyawan juriya na girgiza zafin zafi, tsawon sabis fiye da mai ɗaukar ma'adini sau 3-5.

Sauƙaƙe gyare-gyare: girman goyan baya, tazarar ramin, gyare-gyaren zurfin jiyya na saman.