Tashar Insulator ta Quartz 300mm

Na'urar AMAT Quartz Insulator Pedestal 300mm (Lambar Sashe: 0200-14197) wani sinadari ne mai inganci wanda aka ƙera shi da inganci, wanda aka ƙera shi don amfani a cikin kayan aikin sarrafa semiconductor mai girman 300mm, gami da tsarin PVD, CVD, da tsarin etching na plasma.

A matsayin wani muhimmin abu na tsari da aiki a cikin ɗakin, wannan ɓangaren yana haɗa tallafin injiniya, rufin lantarki, da kuma keɓewar tsari zuwa wani mafita mai ƙarfi guda ɗaya. An ƙera shi musamman don biyan buƙatun ƙaƙƙarfan buƙatun ƙera wafer na zamani, inda kwanciyar hankali na tsari, sarrafa gurɓatawa, da amincin kayan aiki suke da mahimmanci.

A Semixlab, muna ƙera sassan ma'aunin quartz ta amfani da fasahar haɗaɗɗen quartz mai tsarki da fasahar injina ta zamani don tabbatar da daidaito mai kyau, aikin dielectric, da dorewa na dogon lokaci a ƙarƙashin mawuyacin yanayi na plasma.

Me Yasa Za A Zabi Semiconductor?

Semixlab ya haɗa ƙwarewar kayan aiki, ilimin aiwatar da semiconductor, da kuma kera daidai gwargwado don samar da ingantattun abubuwan quartz ga masana'antun zamani.

Our abũbuwan amfãni:

● Kula da kayan ma'adini mai tsarki sosai

● Injin jure wa matsi don ma'auni masu mahimmanci

● An tabbatar da inganci a aikace-aikacen plasma mai ƙarfi

● Maganganun da suka dace da OEM don dandamalin AMAT

● Tallafin samar da kayayyaki da injiniya mai dorewa a duniya

Aikace-aikacen Tsarin & Matsayin Ɗakin Majalisa

Ana amfani da Quartz Insulator Pedestal a cikin tsarin kera semiconductor na gaba, musamman a cikin yanayin da ya shafi RF plasma, yanayin zafi mai yawa, da kuma sarrafa injinan injin.

Matsayin Ɗakin Majalisa

Ana shigar da wannan bangaren a cikin ƙananan sashin ɗakin aiki, yawanci a ƙarƙashin ko a kusa da taron tallafin wafer (misali, maƙallin lantarki ko matakin hita).

Yana aiki kusa da:

● Yankin sarrafa wafer

● Maƙallin lantarki (ESC) ko tsarin ƙafafun

● Yankunan plasma masu amfani da RF

Matsayi a Tsarin Kayan Aiki

A cikin tsarin ɗakin, Quartz Insulator Pedestal yana aiki a matsayin muhimmin haɗin gwiwa tsakanin abubuwan da ke aiki da wutar lantarki da kuma tsarin injina da aka gina a ƙasa.

Matsayinsa yana ba shi damar:

● A ware abubuwan da ke amfani da wutar lantarki mai ƙarfi ko kuma masu amfani da wutar lantarki ta RF

● Taimaka wa ingancin injina na matakin wafer

● Kiyaye yanayin aiki mai ɗorewa da sarrafawa

Manyan Ayyuka & Fa'idodin Aiki

1) Rufe Wutar Lantarki a Muhalli na RF Plasma

Ɗaya daga cikin mahimman ayyukan wannan bangaren shine samar da babban rufin ƙarfin dielectric a cikin tsarin da ke aiki a ƙarƙashin yanayin RF da yanayin plasma.

● Yana hana zubewar wutar lantarki da hanyoyin kwararar wutar da ba a yi niyya ba

● Yana rage haɗarin kamuwa da ciwon zuciya da rashin kwanciyar hankali a cikin jini

● Tabbatar da daidaiton rarraba filin RF

Sakamako: Ingantaccen maimaituwa da kuma tsaron kayan aiki

2) Tallafin Inji & Kwanciyar Hankali a Tsarin

A matsayin wani ɓangare na taron pedestal, bangaren yana samar da:

● Tallafi mai ɗorewa ga tsarin sarrafa wafer

● Daidaito mai girma don kiyaye daidaito

● Juriya ga nakasawa a ƙarƙashin zagayowar zafi

Sakamako: Ingantaccen daidaiton sanya wafer da daidaiton fim

3) Daidaitawar Jini da Gurɓatawa

An ƙera shi daga quartz mai tsarki mai matuƙar girma, wannan ɓangaren yana bayar da:

● Ƙananan matakan ƙazanta na ƙarfe

● Kyakkyawan juriya ga zaftarewar jini

● Ƙarancin samar da ƙwayoyin cuta

Sakamako: Rage haɗarin gurɓatawa da kuma ingantaccen yawan amfanin wafer

4) Aikin Warewa a Zafi

Quartz yana da ƙarancin ƙarfin lantarki na thermal, wanda ke ba da damar tushe ya:

● Ka ware canja wurin zafi tsakanin na'urorin hita/ESC da tsarin ɗakin

● Kula da bayanan martaba na wafer mai ɗorewa

● Rage matsin lamba na zafi a cikin tsarin

Sakamako: Ingantaccen tsarin sarrafawa da tsawaita tsawon rayuwar kayan aiki