Zoben Ƙasa na Quartz Insulator 0200-15699

Zoben Grounding na AMAT 0200-15699 Quartz Insulator wani sinadari ne mai ƙarfi wanda aka ƙera don samar da keɓancewa ta lantarki da kuma sarrafa ƙasa a cikin kayan aikin sarrafa plasma na semiconductor. Yana haɗa ayyukan insulator na dielectric da kuma hanyar haɗin ƙasa, wanda hakan ya sa ya zama muhimmin ɓangare na tsarin wutar lantarki na ɗakin.

An ƙera wannan ɓangaren don amfani a cikin tsarin etch, CVD, da PVD, kuma yana aiki a cikin mahalli da aka siffanta da:

● Ƙarfin RF mai yawan mita

● Fitar da sinadarin plasma mai ƙarfi sosai

● Sinadaran tsarin amsawa

● Maimaita zagayowar zafi

Ba kamar sassan kariya na quartz na yau da kullun ba, wannan zoben ƙasa yana taka muhimmiyar rawa a cikin aikin lantarki, yana tasiri kai tsaye kan daidaiton plasma, rarraba filin RF, da kuma maimaita tsari.

A Semixlab Technology, ana ƙera zoben ƙasa na Quartz Insulator tare da:

● Quartz mai tsarki mai matuƙar ƙarfi don rage gurɓatawa da haɗarin watsawa

● Injin gyara don tabbatar da daidaiton tazara tsakanin wutar lantarki da kuma dacewa da OEM

● Kammala saman da aka sarrafa don rage samar da ƙwayoyin cuta da rashin daidaiton wutar lantarki

Wannan yana tabbatar da ingantaccen aiki a cikin yanayin masana'antar semiconductor na zamani.

Matsayi a Kayan Aiki da Matsayin Aiki

Matsayi na Shigarwa

Ana shigar da Zoben Grounding na Quartz Insulator yawanci:

A kewayen maƙallin lantarki (ESC)

Tsarin lantarki na RF kusa da tsarin lantarki

A mahaɗin da ke tsakanin yankunan da aka fallasa ga plasma da abubuwan da aka ƙasa

Yana cikin yankin hulɗar filin RF da ke tsakanin plasma da RF, inda ake buƙatar ingantaccen iko na lantarki.

Ayyuka masu mahimmanci

1. Keɓewar Wutar Lantarki (Katangar Dielectric)

Kayan quartz yana aiki azaman dielectric mai aiki mai girma, yana samar da:

● Warewa tsakanin sassan sarrafawa

● Rigakafin hanyoyin da ba a yi niyya ba na halin yanzu

● Kariya daga gajerun da'irori na lantarki

2. Hanyar Gina Ƙasa Mai Sarrafawa

A matsayin wani ɓangare na tsarin ƙasa, zoben:

● Yana kafa ingantaccen ƙarfin tunani

● Yana tsara hanyoyin dawowar lantarki a cikin ɗakin

3. Kwanciyar Plasma da Kula da Filin RF

Ta hanyar ayyana iyakokin lantarki, bangaren yana taimakawa:

● Daidaita rarrabawar yawan plasma

● Kula da daidaiton ion ϧնergy da hanyar da ke kusa da wafer

4. Matsewar Arc da Ingancin Lantarki

Ingantaccen rufi da kuma amfani da ƙasa wajen rage yawan wutar lantarki a yankin, yana taimakawa wajen:

● Rage girman arc (fitar da arc)

● Hana lalacewar ɗaki da katsewar tsari

Hanyoyin Kasawa gama gari

A matsayin muhimmin sashi da aka fallasa ga matsin lamba na lantarki da muhallin plasma, Zoben Quartz Insulator Grounding yana fuskantar hanyoyin lalata abubuwa da yawa:

1. Lalacewar Lantarki da kuma yadda ake amfani da su a saman ruwa

● Gurɓatawa (ƙarfe ko ragowar tsari) na iya haifar da hanyoyin sarrafawa

● Aikin Dielectric na iya raguwa akan lokaci

Tasiri: Rashin daidaiton yanayin RF, ƙaruwar haɗarin kwararar ruwa ko kuma arcing.

2. Lalacewar da ta haifar da jini

● Bomb na ion yana haifar da ƙaiƙayi a saman

● Asarar kayan yana canza tazara tsakanin wutar lantarki da rarrabawar filin

Tasiri: Rage iko akan halayen plasma da ƙaruwar bambancin tsari.

3. Gurɓatar ƙarfe da kuma cire shi

● Sanya kayan da ke sarrafa wutar lantarki a saman quartz

● Canza halayen rufewa

Tasiri: Akwai yiwuwar gazawar ginin ƙasa da rashin daidaiton wutar lantarki.

4. Fashewar Damuwar Zafi

● Maimaita zagayowar dumama da sanyaya yana haifar da damuwa ta ciki

● Ƙananan fasa na iya tasowa da yaduwa

Tasiri: Matsalar injina da kuma lokacin hutun da ba a zata ba.

5. Samar da ƙwayoyin cuta daga Tsufawar Kayan Aiki

● Fuskantar da dogon lokaci yana raunana tsarin quartz

● Ƙananan karaya suna sakin barbashi cikin ɗakin

Tasiri: Asarar yawan amfanin ƙasa da ƙaruwar nakasa a cikin na'urorin semiconductor.

Me yasa za a zaɓi Fasahar Semixlab?

Tare da ƙwarewa mai zurfi a cikin kayan semiconductor da abubuwan da aka haɗa, Semixlab Technology yana ba da mafita na quartz mai inganci wanda aka tsara don yanayin plasma mai ci gaba:

● Kayayyakin tsarki masu matuƙar ƙarfi don ingantaccen rufin lantarki da kuma sarrafa gurɓatawa

● Tsarin da aka ƙera daidaitacce don daidaiton RF da hulɗar plasma

● Tsawaita rayuwar sabis don rage farashin mallakar (CoO)

● Masana'antu masu jituwa da OEM don haɗakarwa mara matsala tare da tsarin AMAT

Zoben ƙasa na Quartz Insulator Grounding Zobenmu suna da aminci daga masana'antun semiconductor waɗanda ke neman madadin ingantattun abubuwa masu inganci don mahimman abubuwan lantarki.