0200-10246 Quartz GDP (Farashin Rarraba Iskar Gas)

AMAT 0200-10246 Quartz GDP (Gas Distribution Plate) wani sinadari ne mai ƙarfin gaske wanda aka ƙera don isar da rarraba iskar gas iri ɗaya da kuma hulɗar plasma mai sarrafawa a cikin kayan aikin sarrafa semiconductor. An tsara shi azaman layin Uni-Insert tare da tsarin ramuka 88, yana aiki azaman ma'amala mai mahimmanci tsakanin tsarin isar da iskar gas da yankin amsawar plasma.

An ƙera wannan bangaren don ci gaba da amfani da plasma etch da CVD, kuma yana aiki a ƙarƙashin yanayi mai tsauri, gami da:

● Fitar da sinadarin plasma mai ƙarfi sosai

● Iskar gas mai amsawa (misali, sinadarai masu tushen fluorine da chlorine)

● Yanayin hawan zafi mai ƙarfi

● Bukatun daidaiton tsari mai tsauri

Ba kamar sassan kariya daga ɗakin da ba a iya aiki da shi ba, GDP na Quartz wani abu ne mai matuƙar muhimmanci wanda ke tasiri kai tsaye kan daidaiton kwararar iskar gas, rarraba yawan plasma, da kuma sarrafa ma'aunin girma (CD).

A Semixlab Technology, ana ƙera kayan aikin Quartz GDP ɗinmu ta amfani da quartz mai tsarki mai matuƙar ƙarfi, tare da haɗa shi da injinan rami masu daidaito da kuma kula da inganci mai tsauri, wanda ke tabbatar da aiki mai dorewa da kuma maimaituwa a cikin ayyukan semiconductor masu wahala.

Matsayi a cikin Kayan Aiki da Ayyukan Aiki

Matsayi na Shigarwa

Yawanci ana shigar da GDP na Quartz:

● A saman taro na ɗakin aiwatarwa

● A cikin ko a ƙarƙashin tsarin saman shawa

● Kai tsaye sama da saman wafer, yana fuskantar yankin plasma

Yana aiki azaman babban hanyar sadarwa don shigar da iskar gas cikin yankin plasma.

Ayyuka masu mahimmanci

1. Rarraba Iskar Gas Iri ɗaya (Babban Aikin)

● Tsarin daidaiton rami mai ramuka 88 yana tabbatar da:

● Daidaita rarrabawar iskar gas a fadin wafer ɗin

● Yawan kwararar iskar gas da alkiblar da aka sarrafa

Sakamako: Inganta daidaiton plasma da kuma daidaiton etch/deposition rates a fadin wafer.

2. Tsarin Plasma da Kula da Kwanciyar Hankali

Ta hanyar daidaita yadda iskar gas ke shiga yankin plasma, GDP:

● Yana tasiri ga ƙonewa da dorewar plasma

● Yana tsara rarrabawar yawan plasma

Tasiri: Inganta kwanciyar hankali na tsari da rage bambancin da ke tsakanin wafers.

3. Daidaito a Tsarin Aiki da Kula da CD

Tsarin lissafi da ramin suna shafar kai tsaye:

● Rarraba Ion da tsattsauran ra'ayi

● Kinetics na amsawa a saman wafer

Amfani: Ingantaccen bayanin etch, daidaiton CD, da kuma maimaitawa ta wafer-to-wafer.

4. Kare Ɗaki da Kula da Gurɓatawa

A matsayin layin quartz, GDP kuma:

● Yana kare sassan kan shawa na ƙarfe daga fallasa gawar plasma

● Yana rage haɗarin gurɓatar ƙarfe

Hanyoyin Kasawa gama gari

Saboda fallasa shi kai tsaye ga plasma da iskar gas mai amsawa, GDP na Quartz yana fuskantar wasu hanyoyin lalata aiki masu iyakancewa:

1. Rufe ramuka (Takardar da aka samo daga samfur)

● Polymer ko samfuran amsawa suna taruwa a cikin ramuka

● Rage kwararar iskar gas ko rashin daidaito

Tasiri: Rasa daidaiton rarraba iskar gas da rashin daidaiton tsari.

2. Lalacewar da ta haifar da jini

● Bom ɗin ion yana faɗaɗa diamita na rami

● Tsarkakewa daga saman yana canza yanayin kwararar ruwa

Tasiri: Canje-canje a cikin rarrabawar yawan plasma da kuma karkatar CD.

3. Fashewa da Samar da Ƙwayoyin Cuku

● Fina-finan da aka ajiye suna fitowa akan lokaci

● Barbashi suna shiga yanayin ɗakin

Tasiri: Ƙara yawan lahani da asarar yawan amfanin ƙasa.

4. Fashewar Damuwar Zafi

● Maimaita zagayowar zafi yana haifar da ƙananan fasa

● Tsarin ginin yana raunana akan lokaci

Tasiri: Matsalar ɓangaren da kuma lokacin hutun da ba a zata ba.

5. Guduwar Iskar Gas

● Sacewa na dogon lokaci yana canza yanayin ciki

● Sauyi a hankali a rarraba kwararar iskar gas

Tasiri: Tsarin aiki mai sauƙi amma mai mahimmanci, mai wahalar ganowa.

Me yasa za a zaɓi Fasahar Semixlab?

Tare da ƙwarewa mai zurfi a cikin kayan semiconductor da ƙera quartz daidai, Semixlab Technology yana ba da mafita na Quartz GDP mai inganci wanda aka tsara don yanayin plasma mai ci gaba:

● Quartz Mai Tsabta Mai Tsabta: Yana tabbatar da ƙarancin gurɓatawa da kuma daidaiton hulɗar plasma.

● Injin Rami Mai Daidaito: Daidaitaccen girman rami, tazara, da kuma yanayin ƙasa don ingantaccen rarraba iskar gas.

● Inganta saman: Yana rage samar da barbashi kuma yana inganta tsaftar tsari.

● Tsawaita Aikin Rayuwa: Inganta juriya ga zaizayar jini da matsin lamba na zafi.

● Tsarin OEM Mai Dacewa: Haɗin kai mara matsala tare da tsarin AMAT da yanayin aiki.

Ana amfani da AMAT 0200-10246 Quartz GDP sosai a cikin:

● Kayan Aiki Tsarin etch na plasma 200mm

● Dakunan aiwatar da CVD da PECVD

● Tsarin ƙera semiconductor mai daidaito

Yana da matuƙar muhimmanci musamman a aikace-aikacen da ke buƙatar cikakken iko kan tsari, gami da:

● Ƙirƙirar ƙulli mai ci gaba

● Masana'antar na'urorin samar da wutar lantarki (SiC, IGBT)

● MEMS da ƙera na'urori na musamman