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Abubuwan da aka shafa AMAT quartz zobe
Semixlab AMAT Quartz Rings yana alfahari da tsaftar tsafta, rage gurɓatawa da haɓaka amincin tsari. Ƙware mafi girman etching, ajiya, da daidaituwar rarrabawa, yana haifar da sarrafa tsari mara misaltuwa da daidaito.Wannan yana fassara zuwa ƴan lahani, mafi girma yawan amfanin ƙasa, kuma a ƙarshe, tsarin samar da farashi mai inganci don fab ɗin ku.
description
Semixlab yana ba da madaidaicin zoben quartz. Ana amfani da wannan samfurin musamman don tabbatar da kwanciyar hankali na fina-finai masu inganci a cikin tsarin PECVD, yayin da ake haɓaka ingantaccen kayan aiki da yawan amfanin wafers. Rarraba plasma yana da ƙuntatawa ta hanyar daidaiton lissafi (± 0.1mm), an inganta filin tafiyar da iskar gas, kuma an inganta daidaiton fim ɗin zuwa σ≤1.5%. Ayyukan tallan tallace-tallace sun rage yawan lahani na wafer da kashi 30%.
Ƙarin Bayanan:
Sunaye: Ma'adini zobe, Si wafer m, ma'adini zobe Kit, ma'adini Ring Kit, Babban Chamber Ring, PECVD Deposition Ring, Gas Rarraba Zobe
Nufa: Tabbatar da kwanciyar hankali na fina-finai masu inganci a cikin tsarin PECVD, yayin da ake haɓaka haɓakar samar da kayan aiki da yawan amfanin wafers.
Mahimman sigogi: Ana ba da shawarar musamman don tsarin jijiya na SiN (silicon nitride), babban ma'adini mai tsabta, da sabis na sutura na musamman ana iya bayar da su. Yana iya jure babban yanayin zafi na 300 zuwa 400 ℃ +, tsayayya da yashwar plasma, tare da ma'adini tsarki ≥99.99%, ƙazantaccen ƙarfe abun ciki ƙasa da 5ppm, kumfa / hada diamita ≤0.1mm, da lambar ≤3 da cubic santimita.
Babban ayyuka da matsayi:
●Mahimman abubuwan da ke cikin ɗakin: Ana zaune a cikin ɗakin aikin PECVD, suna samar da muhimmiyar iyaka na yankin da abin ya shafa.
●Maɗaukakin zafin jiki da juriya na plasma: An yi shi da ma'adini mai tsafta mai tsayi, yana fasalta kyakkyawan juriya mai zafi (zazzabin tsarin PECVD yawanci a cikin kewayon 300 ° C zuwa 400 ° C+) da juriya ga yashwar plasma.
● Keɓewar lantarki/lantarki: Yana taka muhimmiyar rawa a cikin rufin lantarki a cikin ɗakin, yana tabbatar da tsayayyen tsarar plasma da daidaiton tsari.
●Tsarin rufewar iskar gas:Taimakawa wajen kiyaye hatimin yanayin iskar gas a cikin ɗakin.
●Ma'anar yanayin aikin wafer: Matsayinsa na lissafi da yanayin yanayin kai tsaye yana shafar rarraba iskar gas da plasma sama da wafer, wanda ke da mahimmanci ga daidaito da ingancin jigon fim ɗin bakin ciki.
● Rufin saman: Wasu zoben ma'adini da aka yi amfani da su a cikin takamaiman matakai (kamar SiN) na iya zama mai rufi da sutura ta musamman (kamar yttrium oxide Yttria) don ƙara rage ƙaddamar da samfur ko haɓaka aiki da rayuwar sabis ƙarƙashin takamaiman matakai.
Abubuwan da aka Aiwatar da AMAT quartz zobe Yanayin aikace-aikacen
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