Zoben Inuwar Ma'adini 200mm

Zoben Garkuwar Quartz na AMAT 0200-10445 (200 mm) wani sinadari ne mai ƙarfi wanda aka ƙera musamman don tsarin etching na plasma. Yana ƙarƙashin nau'in zoben garkuwa, waɗanda suke da mahimmanci don sarrafa hulɗar plasma a gefunan wafer yayin sarrafa semiconductor.

An ƙera wannan ɓangaren daga quartz mai matuƙar tsarki, an ƙera shi don ya yi aiki a ƙarƙashin yanayi mai tsauri, gami da:

● Yanayin plasma mai ƙarfi

● Sinadaran da suka dogara da fluorine da chlorine masu aiki

● Maimaita zagayowar zafi

Ba kamar sauran kayan kariya na yau da kullun ba, zoben inuwa wani bangare ne mai mahimmanci na tsari wanda ke tasiri kai tsaye kan bayanin martabar etch, daidaito, da kuma sarrafa ma'aunin mahimmanci (CD).

A Semixlab Technology, ana ƙera zoben inuwar mu na quartz ta amfani da waɗannan hanyoyin:

● Zaɓin kayan da aka ƙayyade don tabbatar da ƙarancin gurɓatawa

● Injin aiki mai inganci don tabbatar da daidaiton yanayin geometric

● Ingantaccen maganin saman don rage samar da barbashi

Wannan yana tabbatar da aiki mai dorewa da maimaitawa a cikin hanyoyin ci gaba na etching.

Hanyoyin Kasawa gama gari

A matsayin wani abu mai amfani wanda aka fallasa ga yanayin plasma mai tsauri, zoben inuwa na quartz suna ƙarƙashin hanyoyin lalatawa masu zuwa:

1. Lalacewar da ta haifar da jini

● Ci gaba da fashewar ion yana haifar da ƙaiƙayi a saman

● Asarar kayan abu a hankali yana canza yanayin ƙasa mai mahimmanci

Imfani:

Lalacewar aikin sarrafa gefen, wanda ke haifar da karkacewar girma mai mahimmanci (CD) da rashin daidaiton bayanin martaba.

2. Tsarin Polymer da Tsarin Samfura

● Samfuran da aka yi amfani da su wajen sarrafawa suna taruwa a saman quartz

● Kuɗaɗen ajiya na iya faɗuwa yayin aiki

Imfani:

Ƙara gurɓataccen ƙwayoyin cuta da kuma yawan lahani a kan wafers.

3. Fashewar Damuwar Zafi

● Zagayen dumama da sanyaya akai-akai suna haifar da damuwa a cikin jiki

● Ƙananan fasa na iya yaduwa, wanda ke haifar da gazawar tsarin

Imfani:

Karyewar da ba a zata ba da kuma lokacin dakatar da kayan aiki.

4. Samar da ƙwayoyin cuta saboda tsufar kayan aiki

● Shafawa ta plasma na dogon lokaci yana lalata ingancin quartz

● Microcracks suna fitar da ƙwayoyin cuta zuwa ɗakin

Imfani:

Rage yawan amfanin ƙasa da kuma rage ingancin na'urar.

Me yasa za a zabi Semixlab?

Tare da ƙwarewa mai zurfi a cikin kayan semiconductor da sassan sarrafawa, Semixlab Technology tana ba da kayan maye gurbin aiki masu inganci waɗanda suka cika ko suka wuce ƙa'idodin OEM:

● Quartz mai tsarki sosai don hanyoyin da ke da sauƙin kamuwa da gurɓatawa

● Tsarin lissafi mai inganci don sarrafa gefen daidai

● Tsawaita rayuwar sabis da rage farashin mallakar (CoO)

● Zane-zane masu jituwa da OEM waɗanda ke haɗawa ba tare da matsala ba tare da dandamalin AMAT

Ana amincewa da zoben inuwa na quartz ɗinmu ta hanyar masana'antun semiconductor, suna tallafawa masana'antun da ke neman madadin aminci, masu araha, da kuma masu aiki mai girma don aikace-aikacen etching na plasma.

Wurin Kayan Aiki da Ayyuka

Shigarwa wuri

Ana shigar da zoben inuwa na Quartz yawanci:

● A kusa da yankin gefen wafer

● Sama ko kusa da maƙallin lantarki (ESC)

● A cikin yankin murfin plasma na ɗakin etch

Yana aiki tare da sauran sassan gefen (kamar zoben mai da hankali da zoben murfin) don samar da cikakken tsarin sarrafa gefen.

Ayyuka masu mahimmanci

1. Kariyar Plasma da Gudanar da Rarraba Ion

Babban aikin zoben garkuwa shine ƙirƙirar "tasirin kariya":

● Hana ko daidaita fallasawar plasma a gefen wafer ta hanyar zaɓi

● Daidaita kusurwoyin ion da rarrabawar ion

results:

Ingantaccen sarrafa bayanin martaba na etch, gami da kusurwoyin gefe da amincin fasalin.

2. Inganta Daidaito a Gefen

Ta hanyar tsarin da aka ƙera shi daidai (tsawo, rata, da bayanin martaba), zoben inuwa zai iya:

● Rage tasirin etching na gefen da ƙananan nauyin kaya

● Inganta daidaiton ƙimar etch a cikin wafer ɗin

Imfani:

Yana inganta daidaiton girma mai mahimmanci (CD) kuma yana haɓaka yawan amfanin gefen wafer.

3. Daidaiton Tsarin Aiki da Maimaitawa

Wannan bangaren yana daidaita halayen plasma a yankin gefen ta hanyar:

● Kula da yanayin murfin plasma mai daidaito

● Rage sauye-sauyen tsari yayin tsawaita ayyukan samarwa

Amfani:

Yana inganta daidaiton taga aiki da kuma maimaituwa a cikin samar da kayayyaki masu yawa.

4. Gurɓatawa da Kula da Kayayyaki

Zoben inuwa yana taimakawa wajen:

● Iyakance wuraren ajiyar kaya da ba a so

● Kula da rarraba polymers da samfuran da aka haɗa

Wannan yana rage haɗarin ƙwayoyin cuta kuma yana taimakawa wajen aikin tsaftace ɗakin.