SiC Coated Epitaxial Susceptor

Semixlab's SiC Coated Epitaxial Susceptor an ƙera shi don biyan buƙatun 4H-SiC da 6H-SiC girma epitaxial. Gina daga babban graphite mai tsafta kuma an kiyaye shi tare da rufin SiC daidai sarrafawa, mai cutarwa yana ba da kwanciyar hankali na thermal, amincin sinadarai, da ƙarfin tsari mai mahimmanci don ci-gaba na SiC epitaxial reactors a cikin manyan masana'antun masana'antu.

A tsakiyar falsafar ƙira ita ce buƙatar daidaituwar yanayin zafi na musamman. Mai cutarwa yana aiki azaman zafin zafin jiki na tsarin epitaxy, shafewa da rarraba zafi daidai gwargwado don tabbatar da madaidaicin sarrafa yanayin zafin wafer. Wannan kwanciyar hankali na zafin jiki shine tushe don samun ƙimar girma iri ɗaya, daidaitawar haɗaɗɗun dopant, da daidaiton kauri a saman saman wafer. Don kayan SiC-inda ko da ƙananan ma'aunin zafi na zafi na iya yin tasiri ga yaduwar rarrabuwar jirgin sama ko haifar da bambance-bambancen ilimin halittar jiki - aikin thermal na mai ɗaukar hoto kai tsaye yana siffanta inganci da maimaitawar epi yadudduka da aka yi amfani da su a MOSFETs, SBDs, JBS diodes, da na'urori masu ƙarfi na ci gaba.

Rufin SiC da Semixlab ke amfani da shi yana ba da shinge mai mahimmanci ga nau'ikan iskar gas masu lalata kamar HCl da silanes chlorinated, waɗanda ake amfani da su sosai don murkushe lahani yayin SiC epitaxy. Idan ba tare da wannan Layer na kariya ba, faifan graphite za su shuɗe, haifar da barbashi, kuma su gurɓata saman wafer. Kaurin rufin injiniyan injiniya, ingantaccen tsarin microcrystalline mai tsafta, da halayen mannewa mai ƙarfi suna tabbatar da aikin tsawon rai a ƙarƙashin matsanancin hawan keke. Ta hanyar hana haɓakar ɓarna da lalata kayan abu, mai cutarwa yana kiyaye tsaftar muhallin epitaxial-wani muhimmin abu don rage kurakuran tari, ramukan saman ƙasa, da sauran hanyoyin lahani waɗanda ke tattare da haɓakar SiC.

Semixlab's epitaxial susceptor shima yana taka muhimmiyar rawa wajen tsara tsarin tafiyar da iskar gas a cikin injin. An inganta tsarin sa na lissafi don haɓaka barga, madaidaicin madaidaicin iyakar laminar akan saman wafer, yana ba da damar isar da riga-kafi iri ɗaya da daidaiton motsin motsi a tsakanin wafers da yawa. Wannan filin gudana mai sarrafawa yana haifar da ingantacciyar intra-wafer da wafer-zuwa-wafer iri ɗaya, yana goyan bayan manyan windows tsari da mafi girman kayan aikin masana'antu.

Amincewa da maimaitawa daidai suke a cikin ƙira. An kera kowane mai ɗaukar hoto na Semixlab tare da ingantattun daidaiton girman, ƙayyadaddun ƙayyadaddun kayan ƙayyadaddun ƙayyadaddun ƙayyadaddun kayan, da ingantattun awoyi masu inganci ta hanyar duban gani, thermographic, da microstructural dubawa. Wannan yana tabbatar da cewa masu cin zarafi suna nuna hali akai-akai a cikin batches samarwa, rage juzu'i na daidaitawa, rage raguwar lokaci, da tallafawa tsawan lokacin kayan aiki.

Ta hanyar wannan haɗaɗɗen haɗin kai na daidaitattun zafin jiki, ƙarfin sinadarai, kwanciyar hankali na inji, da ƙarancin ƙazantawa, Semixlab SiC Coated Epitaxial Susceptor yana ba da tushe mai aminci don 4H-SiC da 6H-SiC epitaxy na gaba. An ƙirƙira shi don haɓaka masana'antar na'urar wutar lantarki ta SiC da neman abubuwan da ke ba da damar abin dogaro, mai maimaitawa, haɓakar haɓakar ɗabi'a mai ƙarfi.

Tare da zurfin gwaninta na Semixlab a cikin injiniyoyin kayan aikin semiconductor da kayan aikin sarrafawa, mai cutarwa yana tsaye a matsayin mai ba da gudummawa mai mahimmanci don ingantaccen na'urar, ingantacciyar yawan amfanin ƙasa, da ingantaccen aikin masana'anta na dogon lokaci. Semixlab yana maraba da tambayoyinku a kowane lokaci kuma da gaske yana fatan zama abokin tarayya na dogon lokaci a kasar Sin.