Zoben da aka Rufe na TaC don SiC Epitaxial Reactor

A cikin na'urorin haɗakar sinadarai na silicon carbide, yanayin zafi na aiki yawanci ya wuce 1600 °C a ƙarƙashin yanayin hydrogen da chlorine mai lalata. Ayyukan sassan sarrafa iyaka da gefen kai tsaye yana shafar ingancin layin epitaxial, daidaiton yawan amfanin ƙasa, da lokacin aiki na kayan aiki. An ƙera zoben shafi na tantalum carbide (TaC) na Semixlab musamman don biyan waɗannan buƙatu masu wahala a cikin yanayin samar da taro. Waɗannan zoben suna aiki azaman mahimman abubuwan aiki masu zafi don na'urorin haɗakar sinadarai na SiC, suna tabbatar da kwanciyar hankali na tsari na dogon lokaci, haɓaka epitaxial iri ɗaya, da tsaftar reactor.

A cikin hanyoyin SiC epitaxy, ana sanya zoben shafi na tantalum carbide (TaC) kusa da gefunan wafer ko a cikin yankunan canjin reactor don kwararar zafi da iskar gas. Babban aikinsu shine daidaita yanayin zafin jiki na gida da halayen amsawar tururi a gefunan wafer - yankunan da suka fi fuskantar haɗarin zubar da ƙwayoyin cuta da rashin daidaituwar gefen. Ta hanyar ayyana iyakokin amsawa daidai da kuma danne ajiyar silicon da carbon da ba a so, waɗannan zoben rufi suna haɓaka daidaiton kauri na epitaxial da daidaiton dopant don wafers SiC mai girma-diamita.

An zaɓi murfin tantalum carbide na Semixlab saboda yanayin zafi mai ban mamaki, rashin ƙarfin sinadarai, da juriya ga lalata halide. Tare da wurin narkewar da ya wuce 3880 °C da kuma kyakkyawan jituwa da H₂, HCl, da sauran sinadarai masu lalata da aka saba amfani da su a cikin hanyoyin silicon carbide epitaxy, TaC yana kare tushen da ke ƙasa daga zaizayar ƙasa da lalacewar tsari. Wannan tsarin rufin mai yawan yawa, mai ƙarancin ramuka yana rage samar da barbashi, yana rage haɗarin ƙananan fasa ko ɓarna, kuma yana tabbatar da yanayin reactor mai ɗorewa a lokacin tsawaita lokacin aiki.

Idan aka kwatanta da maganin silicon carbide ko maganin graphite na gargajiya, ƙarfin lalacewa da juriyar tsatsa na Tantalum Carbide Coating yana ƙara tsawon rayuwar kayan aiki sosai, wanda hakan ke rage yawan kulawa da kuma yawan aiki da ke tattare da maye gurbin kayan aiki. Daga hangen farashin samarwa, zoben Tantalum Carbide Coating yana haɓaka maimaita aiki da ingancin farashi. Don manyan layukan samar da kayan aiki da ke da ƙarfin aiki da kuma kera na'urorin lantarki masu ƙarfi, wannan kwanciyar hankali yana fassara zuwa ga yawan amfanin ƙasa, amfani da kayan aiki masu inganci, da kuma ƙarancin farashin samarwa.

A matsayinmu na babbar kamfanin fasaha a fannin aiwatar da aikin semiconductor na epitaxial na kasar Sin, Semixlab tana da kwarewa sosai a fannin fasahar rufi mai zurfi da kayan aikin semiconductor. An tabbatar da cewa za a samar da kuma ƙera Zoben Rufi na TaC don SiC Epitaxial Reactor ɗinmu a ƙarƙashin ƙa'idodin kula da inganci mai tsauri. Semixlab ta ci gaba da jajircewa wajen samar da fasahar zamani da kuma Zoben Rufi na TaC na musamman don hanyoyin samar da Reactor na SiC Epitaxial ga masana'antar semiconductor. Muna fatan zama abokin hulɗarku na dogon lokaci a China.