Zoben Hatimin SSiC

A Semixlab, Zoben Hatiminmu na SSiC suna wakiltar ginshiƙin fasahar hatimin aiki mai ƙarfi wanda aka ƙera don buƙatun tsauraran buƙatun ƙera semiconductor na zamani. An ƙera su daga silinon carbide mai cikakken ƙarfi, mai tsafta, waɗannan abubuwan hatimin suna ba da kwanciyar hankali na sinadarai, juriyar zafi, da ƙarfin injiniya a cikin yanayin iska mai ƙarfi, zafi mai yawa, da gurɓataccen iska. Tare da ƙwarewar injiniya mai kyau a cikin sarrafa wafer na gaba, muna tsara hanyoyin hatimin SSiC waɗanda ke haɓaka kwanciyar hankali na tsari, tsawaita tsawon rayuwar kayan aiki, da kuma kare yawan kayan aiki a cikin na'urorin semiconductor na zamani.

A cikin tsarin epitaxy (Epi), inda wafers ke fuskantar yanayi mai wadataccen hydrogen, sinadarai masu guba da aka yi da chlorine, da kuma yanayin zafi da ya wuce 1200°C, SSiC Sealing Zobba suna taka muhimmiyar rawa wajen kiyaye rabuwar iska tsakanin sararin ɗakin da ke amsawa da kuma abubuwan da ke kewaye da injina. Ƙananan porosity ɗinsu da juriyar tsatsa mara misaltuwa suna tabbatar da ingancin iskar gas na dogon lokaci a cikin reactor, suna hana zubewa, gurɓatawa, da halayen ƙwayoyin cuta waɗanda za su iya kawo cikas ga daidaiton fim ko daidaiton dopant. A cikin tsarin susceptor masu juyawa, juriyar lalacewa mafi girma da kwanciyar hankali na SSiC suna ba da damar aiki mai santsi, ba tare da barbashi ba ta hanyar ci gaba da zagayowar zafi, suna tallafawa samar da ingantattun layukan Si, SiGe, SiC, da GaN.

A cikin dandamalin ALD, CVD, PECVD, da LPCVD, Zoben Hatimin SSiC suna aiki azaman hatimin babban ɗaki, zoben keɓewa, da abubuwan da aka fallasa a cikin plasma waɗanda dole ne su jure wa abubuwan da suka samo asali daga halogen, zaizayar plasma, da kuma zagayowar saukar da famfo akai-akai. Ikonsu na ci gaba da kasancewa ba tare da sinadarai ba a gaban TEOS, TMA, chlorosilanes, nau'in fluorine, da samfuran da aka adana yana sa su zama madadin da aka fi so ga ƙarfe mai rufi ko hatimin polymer. Tsarin lu'ulu'u mai yawa na SSiC na Semixlab yana kawar da fitar da iskar gas da samar da barbashi, yana tallafawa yanayin maimaituwa mai yawa da ƙarancin lahani da ake buƙata don ci gaba da adana sirara mai zurfi. Ta hanyar kiyaye madaidaicin hatimi da amincin injiniya, waɗannan zoben suna daidaita matsin lamba na ɗaki, rarraba zafin jiki, da bayanan kwararar precursor - abubuwan da ke da mahimmanci ga aikin dielectric, shinge, da epitaxial mai daidaito.

A cikin yaɗuwa, ƙara yawan zafin jiki, da kuma yanayin sarrafa zafi mai sauri, Zoben Hatimin SSiC suna ba da ingantaccen hatimi tsakanin yankunan amsawar zafi da mahaɗan injina na yanayi na tsarin tanderu. Ƙarfin faɗaɗa zafi mai matuƙar ƙasa, tare da ƙarfin karyewa da juriya mai kyau ga iskar shaka, yana ba su damar kiyaye amincin iskar gas da kwanciyar hankali na inji har ma sama da 1400°C. Wannan yana tabbatar da kunnawar dopant iri ɗaya, yanayin tanderu mai ɗorewa, da daidaiton wafer-zuwa-wafer, rage yawan ƙazanta da rage gudu a cikin sigogin tsari. Ga tanderun bututu da ɗakunan RTP/RTA iri ɗaya, juriyar SSiC a ƙarƙashin saurin yanayin zafi yana tabbatar da tsawon rayuwar aiki, ƙarancin katsewar kulawa, da kuma tsarkin tsari mai kariya.

Ta hanyar duba tsarin microstructural mai ƙuduri mai girma, kimanta juriya ga plasma-etch, daidaita girman girma, da kuma nazarin gurɓatawa, an tabbatar da kowace zoben hatimi bisa ga ƙa'idodin masana'antu na duniya. Abubuwan da suka haifar suna nuna ƙarancin ƙazanta na ionic, kusan sifili mai wucewa, da kwanciyar hankali na girma na dogon lokaci, wanda ke ba wa masana'antun masana'antu da kayan aiki damar cimma mafi girman lokacin aiki, tsawaita zagayowar PM, da kuma daidaiton tsari mai kyau a duk faɗin layin samarwa. Semixlab koyaushe abokin tarayya ne amintacce a cikin dogon lokaci a fannin semiconductor sintered silicon carbide (SSiC).